
◎ Two Types of IPA Mist Generation Systems
1. Injection System
IPA concentration control
Independent adjustable IPA flow rate and N2 flow rate
2. Budding System
Selectable N2 gas temperature (hot and cool)
Switchable high and low concentration
◎ Two Types of IPA Mist Jet Systems
1. Indirect Jet System
Uniformed IPA concentration in the drying chamber
Decreased drying time by 250-300 seconds (including transfer time)
2. Direct Jet System
IPA mist jet system from the upper part in the chamber
Switchable high and low consentration
◎ Continuous process in oxygen-free conditions
◎ RD mode (DIW) rinse-dry
◎ FRD mode DHF- (DIW) rinse-dry
◎ Uniformity: oxide etch uniformity
◎ 30ű4% (FMMDS mode only)
◎ 45nm compatibility