VRC Series VRC310S/VRC200S
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特長
FEATURES
◎ Clean unit installed.
◎ The droplet measuring is accurate (±10%).
◎ The droplet collection is efficient (over 90%).
◎ The maximum amount of the droplet is 200μl (depending on the liquid composition).
◎ The collecting performance level is 10atons/cm2 (for 8-inch wafers), from AAS analysis (depending on the liquid composition).
◎ Scanning is available for any intended range by changing the mode setting.
◎ A retainer will be used for each wafer, to prevent cross-contamination.
◎ Contains CE mark.