VRC Series VRC310S/VRC200S
VRC Series VRC310S/VRC200S

◎ Clean unit installed.

◎ The droplet measuring is accurate (±10%).

◎ The droplet collection is efficient (over 90%).

◎ The maximum amount of the droplet is 200μl (depending on the liquid composition).

◎ The collecting performance level is 10atons/cm2 (for 8-inch wafers), from AAS analysis (depending on the liquid composition).

◎ Scanning is available for any intended range by changing the mode setting.

◎ A retainer will be used for each wafer, to prevent cross-contamination.

◎ Contains CE mark.