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VRC Series VRC310S/VRC200S

Vapor-Phase Decomposition Residue Collection

FEATURES

  • Clean unit installed.
  • The droplet measuring is accurate (±10%).
  • The droplet collection is efficient (over 90%).
  • The maximum amount of the droplet is 200μl (depending on the liquid composition).
  • The collecting performance level is 10atons/cm2 (for 8-inch wafers), from AAS analysis (depending on the liquid composition).
  • Scanning is available for any intended range by changing the mode setting.
  • A retainer will be used for each wafer, to prevent cross-contamination.
  • Contains CE mark.
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