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BW Series 3000/2000

Increased productivity!

FEATURES

  • Increased throughput
  • Selection of high speed LD/ULD (I-Type)
    (up to 500 WPH with 300mm wafers)
  • Smaller footprint
  • Reduced CoO
  • Air flow control
  • Complete standardization (stabilized performance, reduced set-up time)
  • SEMI standard
  • SECS/GEM compliant
  • EES (EDA or TDI) compliant
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